申请人 |
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US |
发明人 |
COLLINS, KENNETH S., SAN JOSE, CALIFORNIA 95037, US;RODERICK, CRAIG A., SAN JOSE, CA 95117, US;YANG, CHAN-LON, LOS GATOS, CA 95032, US;WANG, DAVID N.K., SARATOGA, CA 95070, US;MAYDAN, DAN, LOS ALTOS HILLS, CA 94022, US |