| 摘要 |
The installation for multilayered coating of a strip (6) incorporates coating chambers (1, 1') which house at least one cooling roll (7) and at least one magnetron sputtering source (12). The chambers are provided with frames which carry the cooling rolls, as well as strip tension measurement and deflection rolls (8.1, 8.2, 8.3; 13), and are displaceable in such a way that the rolls of the two chambers are adjusted relative to one another. At the same time, the magnetron sputtering sources are displaceable so that their longitudinal central axes are adjustable parallel to the axes of their respective cooling rolls.
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| 申请人 |
VON ARDENNE ANLAGENTECHNIK GMBH, 01324 DRESDEN, DE |
发明人 |
LENK, PETER, DR.RER.OEC. DIPL.-PHYS., 01324 DRESDEN, DE;ERBKAMM, WOLFGANG, 01257 DRESDEN, DE;NAKAJIMA, AKIRA, OSAKA, JP;SOEJIMA, KOZO, OSAKA, JP;ZSCHIESCHANG, ERWIN, 01324 DRESDEN, DE;KAMMER, MANFRED, 01189 DRESDEN, DE |
