Piezoelektrisch betätigtes Mikroventil

摘要

PCT No. PCT/EP97/06498 Sec. 371 Date May 20, 1999 Sec. 102(e) Date May 20, 1999 PCT Filed Nov. 20, 1997 PCT Pub. No. WO98/23869 PCT Pub. Date Jun. 4, 1998A microvalve includes a micromechanically structured chip defining a valve seat with a flow opening therethrough, an elastic suspension device and an edge region. A valve plate is defined by a piezoelectric actuator and is connected to the edge region of the micromechanically structured chip. The longitudinal dimension of the piezoelectric actuator are able to be changed by the application of an electric voltage. A decrease in the longitudinal dimension of the piezoelectric actuator caused by the application of an electric voltage is mechanically converted into a movement of the valve plate relative to the valve seat essentially at a right angle to the longitudinal direction. The connection of the piezoelectric actuator with the edge region of the micromechanically structured chip and the suspension device causes the conversion. Thus, the valve plate will open or close the flow opening in the valve seat.