Exhaust gas flow measuring equipment of internal combustion engine and process for calibrating sensitivity of trace gas flow meter

摘要

This invention provides an exhaust gas flow rate measuring equipment of the internal combustion engine (2) which can preferably supply helium gas only to a trace gas analyzer (13), can prevent the condition in which the inside of the trace gas analyzer (13) in the high vacuum stage causes pressure fluctuation due to the viscosity of the exhaust gas and the introduction rate of helium gas fluctuates in proportion to the fluctuation rate, and can solve the problem in that the sensitivity varies in accordance with the gas component ratio in the exhaust gas.