发明名称 CONTACT BUMP STRUCTURE AND METHOD FOR FABRICATING CONTACT BUMPS
摘要 The invention relates to a contact bump structure formed onto an aluminium contact pad area (3) on a silicon substrate (1) and a method of forming said contact bump structure. According to the invention, said contact bump structure comprises a tin bump (8) formed by means of an autocatalytic reaction on said contact pad area (3).
申请公布号 EP0878023(A1) 申请公布日期 1998.11.18
申请号 EP19970901650 申请日期 1997.01.30
申请人 PICOPAK OY 发明人 AINTILA, AHTI
分类号 H01L21/60;H01L23/485;(IPC1-7):H01L21/60;H01L23/48 主分类号 H01L21/60
代理机构 代理人
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