ETCHING METHOD FOR POLYSILICON FILM,申请号JP19970213804-传众专利搜索

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发明名称	ETCHING METHOD FOR POLYSILICON FILM
摘要
申请公布号	JPH10308382(A)	申请公布日期	1998.11.17
申请号	JP19970213804	申请日期	1997.05.08
申请人	NITTETSU SEMICONDUCTOR KK	发明人	SHUTO MITSUKO
分类号	H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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