| 摘要 |
PROBLEM TO BE SOLVED: To provide a hybrid waveguide optical circuit having a structure which requires a low cost and attains sealing with excellent moisture-proof property and reliability, and a method for manufacturing the same. SOLUTION: A surface planarization layer 31 is provided inside of an upper clad layer 22 in such a manner as to surround a cut-out portion 23, in which a material having poor long-term reliability such as an optical element (LD) 25 is mounted. By this surface planarization layer 31, the surface of the upper clad layer 22c around the cut-out portion 23 is flattened. In this flattened region, a sealing cover is fixed with a fixing agent, thus locally hermetically sealing the cut-out portion 23. In this case, the sealing cover is fixed to the plane clad surface, and the gap between the sealing cover and the clad surface can be set to be extremely small. Therefore, the quantity of the fixing agent can be minimized. For example, in the case where a resin is used as the fixing agent, an excellent moisture-proof effect can be exhibited. In comparison with a conventional optical module in which the whole package is hermetically sealed by soldering or YAG welding, the sealing cost can be significantly reduced and a module of a lower price can be realized. |
