| 摘要 |
PROBLEM TO BE SOLVED: To make a fast and successive processing at an uneven interval possible by the Q switch laser in a way that the Q switch laser oscillator starts to oscillate at a virtual processing point, set in front of the laser processing point and in the order of actual processing arrangements, and the beam cutoff means opens at the first processing point. SOLUTION: The laser oscillator 301 contains a Q switch element and oscillates the Q switch pulse in accordance with the oscillation command signal. The laser pulse beam from the laser oscillator 301 is condensed on to the processing object 306 through a condensing lens 304 and conducts a processing by irradiation of the laser pulse to a given processing point. The processing object 306 is mounted on a moving stage 305 and moves following to the driving command from the controller 303 at a speed and by following the track programmed. The controller 303 controls to have the laser unit 301 start at the time the object passes the point pre-programmed, the AO element 302 switch on when it passes through the first processing point and to have the laser beam irradiates. |
