METHOD FOR FIXING DUST, METHOD FOR PUTTING MARK AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To prevent a microdust from being scattered by a charged beam by supplying a viscous liquid material to a region containing a dust prior to an analytic process thereby fixing the dust onto an object to be inspected. SOLUTION: A pipet 10 filled with a liquid material is lowered until it touches the surface of a substrate 2 in the vicinity of a duct 3. Lowering of the pipet 10 is then stopped and the forward end part thereof its observed with an optical microscope thus detecting contact. When a gas impact 12 is applied with nitrogen gas from the rear of the pipet 10 under a state where the pipet 10 touches the substrate 2, a liquid material 11 is jetted onto the substrate 2 and brought into contact with the duct 3 at the forward end of the pipet 10. After the liquid material 11 is supplied to the periphery of the dust 3, gas impact 12 is stopped and the pipet 10 is lifted. In this regard, wetting of the liquid is prevented from spreading significantly as compared with the scale of the dust 3 and normally limited within 15μm. According to the arrangement, the dust on the substrate 2 is prevented from being scattered through irradiation with a charged beam at the time of failure analysis.