Method and apparatus for determining surface roughness

摘要

A method for monitoring surface roughness by applying a controlled amount of liquid onto a specimen surface to form a liquid protrusion. The diameter or area of the a liquid protrusion is measured and correlated to surface roughness. In an alternative embodiment, the contact angle between the specimen surface and the liquid protrusion is measured. Surface roughness is computed from the contact angle measurement and several known physical constants of the liquid and specimen surface.