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经营范围
发明名称
FILM FORMING DEVICE
摘要
申请公布号
JPH10306376(A)
申请公布日期
1998.11.17
申请号
JP19970126503
申请日期
1997.04.28
申请人
KOKUSAI ELECTRIC CO LTD
发明人
TAKAZAWA HIROMASA
分类号
C23C16/40;C23C16/44;C23C16/455;H01L21/31;(IPC1-7):C23C16/44
主分类号
C23C16/40
代理机构
代理人
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地址
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