| 摘要 |
PROBLEM TO BE SOLVED: To simplify the structure and to reduce the cost by making it possible to open and close a door by one actuator. SOLUTION: For the opening/closing mechanism 34 for the door provided in the conveyance opening 31 of an airtight chamber 30, the elevation actuator 35 is provided with a support block 37 rotatably, and the support block 37 is provided with a stopper 44 which can abut against the airtight chamber 30 at one end and with at least one of levers 38, 39, and 40 on the other end, and the upper end of the lever is fitted to the door. The door is moved by the expansion and contraction of the elevation actuator 35, and the expanding/ contracting motion of the elevation actuator 35 at its stroke end is converted by a stopper 44 into the rotation of the support block 37, so that the rotation of the support block 37 induces the door to contact and leave the door conveyance opening. |
