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发明名称
Ionized pvd source to produce uniform low-particle deposition
摘要
申请公布号
SG54615(A1)
申请公布日期
1998.11.16
申请号
SG19980000041
申请日期
1998.01.06
申请人
APPLIED MATERIALS, INC.
发明人
MING FU JIAN
分类号
C23C14/34;H01J37/34;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/34
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代理人
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