发明名称 ROTARY POSITIONING MECHANISM AND SEMICONDUCTOR MANUFACTURING DEVICE USING IT
摘要 PROBLEM TO BE SOLVED: To improve the position correcting accuracy of a rotated object in the direction of rotation. SOLUTION: A rotary positioning mechanism comprises a rotary base member 1 which supports a rotated object, a rotary mechanism supporting section 2 which rotatably supports the member 1, a ball screw 3e which is provided at a prescribed distance from the center 1a of rotation of the member 1 and has a rotating shaft 3a, a stepping motor 4 which rotates the screw 3, a linearly reciprocating member 5 which is coupled with the screw 3 and moved toward and from the shaft 3a when the screw 3 is rotated, a swinging arm 1c which is attached to the member 1 and engaged with the member 5, first and second bearings 6a and 6b laminated upon another on the arm 1c at a prescribed distance from the center 1a of rotation of the member 1, and roller guides 5a attached to both sides of the member 5. The rotary base member 1 is finely adjusted in the direction of ration by rotating the ball screw 3.
申请公布号 JPH10303224(A) 申请公布日期 1998.11.13
申请号 JP19970113127 申请日期 1997.04.30
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD;N S K ATAGO:KK 发明人 NISHIO HIDEJI;WATANABE HIROSHI;HIBINO TOMOO
分类号 H01L21/52 主分类号 H01L21/52
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