| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive acceleration sensor of high sensitivity, high frequency response and low drift, and its manufacture. SOLUTION: A weight part 1a is supported to a supporting part 1c by a flexible part 1b. An upper and a lower face of the weight part 1a are covered with an upper substrate 2a as a fixed substrate which has a recessed part 3a and a lower substrate 2b having a recessed part 3b. The upper substrate 2a and lower substrate 2b are bonded to the supporting part 1c. A d.c. voltage is impressed to the supporting part 1c holding the weight part 1a therebetween, so that +Q and -Q charges are accumulated at the supporting part. While no acceleration is applied, a face of the supporting part 1c confronting the weight part 1a and a face of the weight part 1a confronting the supporting part 1c perfectly overlap with each other. |
