| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the content volume by reducing a gas control line, improve the maintenance efficiency by facilitating connection and disconnection of a gas control apparatus, realize a high freedom of passage design by using standardized component parts, to reduce the total manufacture lead time, and improve the changing property, the responsiveness, and the like to the passage change. SOLUTION: A passage block 29 has a circular installing hole 30 opened upward at the upper part, and has a gas inflow passage 32 and a gas outflow passage 33 opened to the bottom surface of the installing hole 30. While neighboring passage blocks 29 are connected in order to communicate the gas outflow passage 23 and the gas inflow passage 32 by providing a metal gasket 40, they are installed in a base plate 1 along numerous gas feed control lines 20 provided in parallel. To the installing hole 30 of each passage block 29, the body 48 of a desired gas control apparatus such as an automatic diaphragm valve 21 composed in a vertical type is inserted by providing a gasket 59. A connection tube 62 fitted to the body 48 is screwed in to the passage block 29, and the gas control apparatus is connected removably to the passage block 29.</p> |
