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发明名称
METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10303375(A)
申请公布日期
1998.11.13
申请号
JP19970105503
申请日期
1997.04.23
申请人
SONY CORP
发明人
TSUKAMOTO MASANORI
分类号
H01L23/52;H01L21/3205;H01L27/08;(IPC1-7):H01L27/08;H01L21/320
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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