| 摘要 |
PROBLEM TO BE SOLVED: To improve stress relaxing effect of a bump formed on a pad without lowering producibility by forming an approximately bell-shaped recess in a lower edge face with a through hole for feeding a wire in a capillary. SOLUTION: An approximately bell-shaped recess 3 is formed in a part of a lower end part of a capillary 1a wherein a through hole 2 for feeding a wire is shaped to have a diameter ϕ and a height (h) in a lower end. The recess 3 is formed so that at least a part of a ball formed at a tip of a wire is put so that a size, mainly a height of a bump, is large. Furthermore, an enlarged part 4 whose diameter is large as it is down is provided to a lower end of the opening 3 of the capillary 1b. If not, a tapered part 5 whose diameter is large as it falls down is formed in an upper end of the opening 3 of the capillary 1c. A bump can be enlarged in this way. |
