摘要 |
A nozzle plate (200) for an ink jet print head transducer (2). The nozzle plate comprises a silicon portion (205) with two substantially parallel surfaces (235, 238). Nozzle orifices (210) are fabricated on both surfaces of silicon wafer by etching a plurality of grooves into a silicon wafer. After the grooves are etched into the surface of the silicon, a glass plate (220, 222) is laminated onto each surface of the silicon. After the glass plate is laminated onto the silicon wafer, the resulting glass-silicon-glass sandwich is diced into multiple nozzle plates. |