AUTOMATIC DRAINAGE SYSTEM FOR SEMICONDUCTOR CLEANING DEVICE,申请号JP19980113785-传众专利搜索

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发明名称	AUTOMATIC DRAINAGE SYSTEM FOR SEMICONDUCTOR CLEANING DEVICE
摘要
申请公布号	JPH10303174(A)	申请公布日期	1998.11.13
申请号	JP19980113785	申请日期	1998.04.23
申请人	LG SEMICON CO LTD	发明人	YOUN-KWON KIM
分类号	H01L21/304;H01L21/00;H01L21/64;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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