| 摘要 |
PROBLEM TO BE SOLVED: To prevent an alkaline component from fleeding to the connecting part of a display electrode, dielectric layer or panel of a drive circuit and improve the adhesion to ensure the long-term reliability by treating at least one surface of a glass substrate with ultraviolet rays is oxygen atmosphere. SOLUTION: A glass substrate 13 is carried to a processing chamber 18 by a roller 19. Ozone or oxygen gas of from thousands to tens of thousands of PPM is introduced from an ozone generating device 24 to a processing chamber space 14 to the degree of atmospheric pressure through a valve 22 and a valve 23, and after the glass substrate 13 is carried to a prescribed position, an UV lamp 17 is lighted. On the glass substrate 13 irradiated with UV under this gas atmosphere, a transparent electrode film, an address electrode film, or an alkaline component barrier layer is formed. Thus, the adhesion of the glass substrate surface with the transparent electrode, the address electrode or the alkaline component barrier layer is improved, and the frequency of abnormal discharges of the panel is sharply reduced. |
