| 摘要 |
PROBLEM TO BE SOLVED: To obtain VO2 thin film excellent in surface properties by forming a metal-nonmetal transition layer composed of metal-oxide showing reversible metal-nonmetal transition concerning temperature on the substrate in the atmosphere composed of He, Ar and O2 . SOLUTION: Regarding ROM type optical disk 10, a primary layer 2A, a metal-nonmetal transition layer 2, a reflection layer 3 and a protective layer 4 are successively laminated on a transparent substrate 1 with preliminarily formed information pits. In manufacturing such ROM type optical disk, in a vacuum chamber a film of primary layer 2A is formed on the substrate 1, then O2 , Ar and He are introduced, partial pressure ratio of He is >=3% and <=50%, and presputtering is executed until the state of oxidation of target surface becomes stationary. After that, the film of metal-nonmetal transition layer 2 is formed on the primary layer 2A. Thus, through the mediating layer 2A, metal-nonmetal transition layer 2 is treated by normal sputtering on the substrate 1 under the control of film forming velocity. |
