摘要 |
PROBLEM TO BE SOLVED: To obtain total delay characteristics and to correct a delay error based on it for accurate inspection and imaging by providing an instrument for measuring the amount of delay from the generation of a trigger by a trigger generator to a reflection signal. SOLUTION: A trigger signal from a trigger generator 4 reaches an adder 5 after the amount of delay for each ultrasonic transmission/reception element is controlled by delay control parts 1-1 to 1-N. The output of the adder 5 is converted to digital data by an A/D converter 6, and the amount of delay is calculated by obtaining the time difference between a trigger and the detection of reflection waves that are output of the adder 5. In this manner, by using a measuring instrument 7 of the amount of delay, the delay characteristics of a transmission path of the delay control parts 1-1 to 1-N and the surrounding can be measured. For example, a material, a structure, and an organism can be inspected accurately by ultrasonic waves by giving the corrected amount of delay to the delay control parts 1-1 to 1-N when inspecting ultrasonic waves based on the delay characteristic measurement result. |