| 摘要 |
PROBLEM TO BE SOLVED: To provide a bubble generation preventing mechanism which can prevent the generation of bubbles in a treating solution, even when the flow of the treating solution is stopped, and a liquid treating device using the mechanism. SOLUTION: Even when a treating solution is transported to a nozzle side due to the inertia of the solution when the flow of the treating solution is stopped, the occurrence of a reduced-pressure state on the downstream of an air-operated valve 81 can be prevented, because bellows 85 shrink correspondingly to the inertia of the treating solution and reduce the volume of the treating solution in a pipeline 84. Therefore, the generation of bubbles on the downstream of the valve 81 can be prevented when the internal pressure of the pipeline returns to a normal state from the reduced state. |
