| 摘要 |
PROBLEM TO BE SOLVED: To improve the measuring precision and prevent dirt from depositing on the contact in measurement. SOLUTION: A measuring contact pin 21 has an outer cylinder 21a with its outline equal to that of the outer cylinder of a probe contact pin 8 and a movable contact 21b fitted and held to the inner face thereof. The movable contact 21b with its projecting length La from the outer cylinder 21a, when separating from the other member is equal to the projecting length of the movable contact of the probe contact pin 8 and, when pushed in the outer cylinder 21a with outer force, it is held as it is located even after the outer force is removed. In measurement, the measuring contact pin 21 instead of the probe contact pin 8 is part of a test head is inserted therein and the test head 6 is put in contact with a wafer prober 5 or a handler 12 in the same way as in real test and then pulled off to measure a distanceΔL in the projecting direction between the end of the probe contact pin 8 and the end of the measuring contact pin 21 for stroke operation.
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