ELASTIC BOUNDARY WAVE DEVICE AND METHOD OF ITS MANUFACTURE

摘要

An elastic boundary wave device having an improved conversion efficiency of an elastic wave generated by electrodes and which is not influenced by the parasitic resistance between the electrodes. Comb-shaped electrodes (3) are formed on a major surface of a piezoelectric first substrate (2). A dieletric film (5) having a smooth surface is formed on the major surface of the first substrate (2) so as to cover the comb-shaped electrodes (3), and a silicon base second substrate (6) is stuck to the dielectric film (5).