SURFACE ACOUSTIC WAVE AND BULK ACOUSTIC WAVE DEVICES USING A Zn(1-x) YxO PIEZOELECTRIC LAYER DEVICE
摘要
The SAW device comprises a diamond or quartz substrate as a wave propagation layer, a piezoelectric layer on the wave propagation layer and at least one interdigitated electrode on the piezoelectric layer.
申请公布号
WO9851009(A1)
申请公布日期
1998.11.12
申请号
WO1998US09457
申请日期
1998.05.08
申请人
KOBE STEEL USA INC.;STONER, BRIAN, R.;HENARD, ROBERT, B.;DREIFUS, DAVID, L.;FOX, BRADLEY, A.
发明人
STONER, BRIAN, R.;HENARD, ROBERT, B.;DREIFUS, DAVID, L.;FOX, BRADLEY, A.
