| 摘要 |
<p>A compact x-ray tube assembly (9) comprises an evacuated chamber (10) enclosed by a ceramic tubular envelope (11), an attached power supply (12) at one end connected to an emitter (19) inside the chamber, electrostatic means (17) for focusing a beam of electrons on a metal foil target (15), an end window (14) at the other end comprising said target (15), the thickness and composition of the metal foil target and the e-beam energy being selected to generate a microfocused bright beam of x-rays of a preselected energy. The compact assembly is useful in a method for aligning or positioning layers used in the production of microelectronics components.</p> |
