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发明名称
Festkörperbildaufnahme-Vorrichtung und Herstellungsverfahren
摘要
申请公布号
DE69318202(T2)
申请公布日期
1998.11.12
申请号
DE19936018202T
申请日期
1993.02.18
申请人
MATSUSHITA ELECTRONICS CORP., KADOMA, OSAKA, JP
发明人
MIZUSHIMA, KAZUYOSHI, TAKATUKI-SHI, OSAKA-FU 569, JP;OKADA, HIROYUKI, OSAKA-SHI 535, JP
分类号
H01L27/146;H01L27/148;H01L31/0216;(IPC1-7):H01L21/768
主分类号
H01L27/146
代理机构
代理人
主权项
地址
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