| 摘要 |
Gas mixtures having precise compositions are prepared by separately pumping the components in liquid phase through piping, vaporizing the components, blending the components and analyzing the mixture for composition. A signal sent to a control unit causes any necessary change in the rate of pumping of the liquid components to reduce the difference between the measured concentration and the desired concentration. When the composition is within desired limits it is charged into gas cylinders. <IMAGE> |
