| 摘要 |
PURPOSE:To obtain the optical bending waveguide of a low reflection loss provided with a reflecting mirror having a flat surface by forming a resist pattern for the reflecting mirror having flat side walls and etching a substrate with a resist pattern for the optical waveguide as a mask. CONSTITUTION:The reflecting mirror is first formed on the substrate and thereafter, the optical waveguide is formed. Namely, the focus of an exposing beam at the time of resist exposing using a photolithographic technique on the flat plate is matched with the surface of the substrate 11 uniformly over the entire area thereof so that the resist pattern 20 for the reflecting mirror having the flat side wall is formed by the development to be executed thereafter. The surface of the substrate 11 is etched by using such resist pattern 20 for the reflecting mirror, by which the reflecting mirror 21 having the flat surface is easily formed. The reflecting mirror 21 having the reflecting mirror surface flat over the entire area is easily and exactly formed in this way. The reflection type optical bending waveguide 23 which is small in reflection loss and has a good propagation characteristic is obtd. |
