Purge and rough cryopump regeneration process cryopump and controller,申请号GB19980020453-传众专利搜索

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发明名称	Purge and rough cryopump regeneration process cryopump and controller
摘要
申请公布号	GB9820453(D0)	申请公布日期	1998.11.11
申请号	GB19980020453	申请日期	1997.02.12
申请人	HELIX TECHNOLOGY CORPORATION	发明人
分类号	F04B37/16;F04B37/08	主分类号	F04B37/16
代理机构		代理人
主权项
地址

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