| 摘要 |
<p>An energy-dispersive-type semiconductor (EDS) detector (3) includes a slidably mounted cryostat (4) cooled by a small-sized gas-circulation-type refrigerator. Helium gas is supplied from a compressor (17) via a pressure converting valve unit (18) and a connecting pipe (21) to the refrigerator in the form of pressure waves or pulses, to cool an X-ray detecting element. The connecting pipe (21) includes a rigid pipe body portion (21a) connected to the valve unit (18), and a flexible pipe portion (21 b) which connects the rigid pipe portion to the refrigerator. The rigid pipe portion (21a) is held by a vibration-proofing or damping stand (22), which serves to damp out vibrations caused by the pressure waves or pulses so that these vibrations will not be transferred to the EDS detector to any significant degree. Further damping may be provided by one or more weights (24) mounted on the flexible pipe portion (21b).</p> |
