发明名称 TREATING LIQUID DISCHARGING VALVE AND SUBSTRATE TREATING DEVICE UTILIZING THE SAME
摘要 PROBLEM TO BE SOLVED: To prevent bacteria from being generated in treating liquid feed routes when treating liquids of two or more kinds are discharged to a body to be treated. SOLUTION: In this valve, a first connecting chamber 5 to which a first treating liquid is fed and a second connecting chamber 9 to which a second treating liquid is fed are formed. The connecting chambers 5, 9 communicate with a discharge chamber 11 through first and second flow out ports 4, 8 respectively. In the connecting chambers 5, 9, furthermore, first and second discharge ports 3, 7 are formed respectively. The outlets 4, 8, 3, 7 are opened and closed by opening/closing mechanism 13, 15, 12, 14 respectively. In this constitution, when one treating liquid is made to flow out to the discharge chamber 11 from the connecting chamber, the other treating liquid can be discharged to the outside from the connecting chamber. That is, since the treating liquids are normally circulated in the valve, bacteria are prevented from being generated.
申请公布号 JPH10296163(A) 申请公布日期 1998.11.10
申请号 JP19970109730 申请日期 1997.04.25
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KIMURA YOSHIHIRO;MATSUDA TSUGUMASA
分类号 G03F7/30;B05C11/10;H01L21/02;H01L21/304;(IPC1-7):B05C11/10 主分类号 G03F7/30
代理机构 代理人
主权项
地址