| 摘要 |
<p>PROBLEM TO BE SOLVED: To regulate the resistance value of the surface of hard carbon coating film formed on an insulating material so as to prevent the change of static electricity on the surface. SOLUTION: A base film 14 having electric conductivity is formed on the surface of an insulating material 12 as a base material, a hard carbon film 16 is formed on the base film 14, and by changing the resistance value of the base film 14, the surface resistance value of the hard carbon film 16 is regulated. In the case the base film 14 is formed out of a metallic film of titanium, chromium, tungsten or the like, the resistance value is regulated by the film thickness. In the case it is formed by semiconductor film of silicone, germanium or the like, the resistance value can changed by the film thickness or the concn. of impurities.</p> |
