发明名称 |
Negative offset bipolar electrostatic chucks |
摘要 |
A bipolar electrostatic chuck system having a bipolar electrostatic chuck for securely holding a wafer on the surface of the bipolar electrostatic chuck. The bipolar electrostatic chuck system includes a negative-offset power supply for providing a positive potential level and a negative potential level. The positive potential level is positively biased relative to a common reference voltage level by a first magnitude while the negative potential level is negatively biased relative to the same common reference voltage level by a second magnitude, which is larger than the first magnitude. Further, the bipolar electrostatic chuck includes a positive pole, which is coupled to the negative-offset power supply for biasing the positive pole at the positive potential level when the negative-offset power supply is turned on. Additionally, the bipolar electrostatic chuck includes a negative pole, which is coupled to the negative-offset power supply for biasing the negative pole at the negative potential level when the negative-offset power supply is turned on.
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申请公布号 |
US5835333(A) |
申请公布日期 |
1998.11.10 |
申请号 |
US19950550510 |
申请日期 |
1995.10.30 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
CASTRO, EDWARD ROSS;TOKUNAGA, KEN EDWIN;ATLAS, BORIS V.;LIU, DAVID RU-CHEN |
分类号 |
H01L21/683;H02N13/00;(IPC1-7):H02N13/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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