| 摘要 |
A wafer prober testing device uses a test head safety interlock system to prevent inadvertent movement of a test head which is locked to a head plate. The test head is movable between a raised position and a lowered position, and is mounted to the head plate when it is in the lowered position. A test head controller controls the movement of the test head between the raised position and the lowered position. A locking lever, which is mounted to the head plate, is movable between a lock position and an unlock position. The locking lever locks the test head to the head plate when the test head is in the lowered position, to ensure that the testing equipment is accurately aligned and that there are satisfactory electrical contacts, as even a minor misalignment of the testing equipment, or a slight vibration or discontinuity with the probe pads will lead to inaccurate test results. A switch is mounted to the head plate and is actuated by the locking lever, so as to control the supply of power to the test head controller. When the locking lever is in the lock position, power is interrupted to the test head controller, and when the locking lever is in the unlock position, power is supplied to the test head controller so as to enable the test head to be moved between the raised position and the lowered position.
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