| 摘要 |
PROBLEM TO BE SOLVED: To provide super high vacuum environment by providing respective drive sources on the positions intercepted from the vacuum environment of a carrying chamber. SOLUTION: A transmission mechanism 17 is constituted of a driven cylinder part 18 having a magnet part 19a, and a magnet coupling having a prime moving cylinder part 19 provided with a magnet part 19a outside the driven cylinder part 18, and the prime moving cylinder part 19 is connected to a motor 8a through a joint 19b. The driven cylinder part 18 is connected to a rotary shaft through a shaft 18b fixedly secured to the center part of the driven cylinder part 18. These magnet parts 18a, 19a are respectively covered with seal materials 18c, 19c so as to obstruct gas or particles from invading, and intercepting material 20 is arranged on the prime moving cylinder part 19 side. Further, between the upper part of a main body case part elevatably moving and the lower part of a carrying chamber, a bellows in which elastically deformable metal sheet is formed into a bellows shape in cross section, is interposed, and hence even when the main body case part is vertically moved, the super high vacuum condition of the interior can be maintained. |
