Mikromechanisches Bauelement mit perforierter, spannungsfreier Membran,申请号DE19965000621-传众专利搜索

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发明名称	Mikromechanisches Bauelement mit perforierter, spannungsfreier Membran
摘要
申请公布号	DE59600621(D1)	申请公布日期	1998.11.05
申请号	DE19965000621	申请日期	1996.07.17
申请人	SIEMENS AG, 80333 MUENCHEN, DE	发明人	CATANESCU, RALF, 28201 BREMEN, DE;NAEHER, ULRICH, DR., 80803 MUENCHEN, DE;SCHEITER, THOMAS, 80469 MUENCHEN, DE;HIEROLD, CHRISTOFER, DR., 81739 MUENCHEN, DE
分类号	G01L9/00;H01L23/00;(IPC1-7):G01L9/00	主分类号	G01L9/00
代理机构		代理人
主权项
地址

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