| 摘要 |
PURPOSE:To provide a technique and a device to measure in-plane distribution of a physical quantity of a sample under nondestruction with resolution of a far smaller area than a radiation area of an electromagnetic wave. CONSTITUTION:An electromagnetic wave 3 emitted from an electromagnetic wave generating source 1 is made incident at a glancing angle (theta) on a sample 4 after being shaped by a slit 2. The electromagnetic wave reflected by the sample is measured by a unidimensional position sensitive type electromagnetic wave detector 9. An average physical quantity of an area on the sample corresponding to an electromagnetic wave 5 incident on a single element of the unidimensional position sensitive type detector, car be obtained from intensity or a wave length of the measured electromagnetic wave 5 by proper analytic processing. Next, the sample is rotated by a prescribed angle with the normal line direction on the surface to which the sample pays attention as the central axis, and the physical quantity of the sample can be obtained from similar measurement. This is repeated until rotation of the sample becomes 180 degrees. In-plane distribution of the physical quantity can be obtained from a series of these measurements by algorithm of computer tomography. |
