发明名称 METHOD FOR SINGLE CRYSTAL GROWTH
摘要 A method for single crystal growth which comprises pulling a single crystal (6) by the CZ method from a starting melt (5) with a cusped magnetic field applied thereto. Regarding a crucible (3) for containing therein the starting melt (5), the inner diameter U is adjusted to (Y + 140 mm) to less than 3Y, wherein Y represents the outer diameter of the single crystal (6). In a state where the cusped magnetic field has been applied, a high pulling yield can be maintained even when the inner diameter U is reduced. Reducing the inner diameter U serves to improve the yields of oxygen and non-dislocation. This in turn can improve the yield of the preparation of the single crystal (6).
申请公布号 WO9849378(A1) 申请公布日期 1998.11.05
申请号 WO1998JP01975 申请日期 1998.04.30
申请人 SUMITOMO SITIX CORPORATION;IZUMI, TERUO 发明人 IZUMI, TERUO
分类号 C30B15/10;C30B15/30;C30B29/06;C30B30/04;H01L21/208;(IPC1-7):C30B15/10 主分类号 C30B15/10
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