| 摘要 |
PURPOSE:To achieve a more complete non-interference control and to improve positioning performance with a simple configuration by laying out the drive points by an actuator at the centers of impact of a rigid object each other. CONSTITUTION:In the (x, y) coordinates where the mass of a substrate 1 of a micromotion positioning mechanism is set to m and an inertial main axis center is set to an origin, inertia moments around the x and y axes are set to Jx and Jy, respectively. Actuators 2M, 2R, and 2L are laid out concentrically with a radius of ld in reference to the origin. Also, when 2 M out of three actuators is laid out at (0, ld) of the (x, y) coordinates, the remaining two actuators 2R and 2L are laid out at the fourth and third quadrants of the (x, y) coordinates, respectively. The layout angle is set to thetad for the x axis. In this case, a micromotion positioning mechanism satisfying the expression is taken, thus increasing the loop gain of a control system and improving the performance easily. |
