Non-contact determination of object surface in measuring chamber

摘要

The method is performed in a measuring chamber, using a common carrier for a projection pattern (2). Also at least one projection system, with which the projection patterns are projectable from different directions on the object. The projection patterns are detectable at the object surfaces by a detection system (7). An evaluation system is used to determine the coordinates of the measuring points by determining the phase positions of the projection pattern at the measuring points. The projections of the projection patterns is achieved under a "Scheimpflugbedingung" (sic) condition, with an imaging objective that is displaced from the optical axis. The different projection patterns are projected on the projection system or systems at different directions in the measuring chamber.