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发明名称
Verfahren zur Herstellung einer Halbleiteranordnung mit einer isolierenden Seitenwand
摘要
申请公布号
DE69227150(D1)
申请公布日期
1998.11.05
申请号
DE1992627150
申请日期
1992.06.19
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
SAKAMOTO, MASARU, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP;FUJITA, KEI, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP
分类号
H01L21/28;H01L21/266;H01L21/285;H01L21/331;H01L21/336;H01L21/768;H01L23/485;(IPC1-7):H01L21/60
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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