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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10294361(A)
申请公布日期
1998.11.04
申请号
JP19970100574
申请日期
1997.04.17
申请人
FUJITSU LTD
发明人
ITO AKIO;IMAI MASAHIKO;HORIE HIROSHI
分类号
H01L21/76;H01L21/304;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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