| 摘要 |
An ink jet recording head comprises: a passage formed substrate (10) having, a diaphragm forming a part of a pressure generating chamber (12) communicating with a nozzle aperture (17) and at least the upper surface of which acts as a lower electrode, and a piezoelectric vibrator (300) including a piezoelectric material layer formed on the surface of the diaphragm, an upper electrode formed on the surface of the piezoelectric material layer and a piezoelectric active part formed in an area opposite to the pressure generating chamber; a cap member (110) joined to the side of the piezoelectric material layer of the passage formed substrate for sealing space in a state in which space to extent that a movement is not prevented is secured; and a flexible portion for absorbing the change of pressure in the space of the cap member. <IMAGE> |
