Method of determining position data and device for measuring the magnification of an optical beam path

摘要

The measuring system is used to provide the position of a feature (22a) of the object (22) examined by the microscope, relative to the direction of the microscope central axis (7), by directing a measuring light beam (57c) along the microscope axis onto the examined feature and detecting the reflected beam via a photosensor (66). The measuring signal obtained from the reflected light beam is compared and/or combined with a reference beam obtained from the light source (64), to determine the travel time of the measuring beam and hence the position of the examined feature.