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经营范围
发明名称
SPIN COATING DEVICE
摘要
申请公布号
JPH10294252(A)
申请公布日期
1998.11.04
申请号
JP19970099973
申请日期
1997.04.17
申请人
SONY CORP
发明人
HAMAZAKI KENICHI
分类号
G03F7/16;B05C11/08;B05D1/40;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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