METHOD OF FILLING IN SHALLOW TRENCH,申请号JP19980098968-传众专利搜索

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发明名称	METHOD OF FILLING IN SHALLOW TRENCH
摘要
申请公布号	JPH10294362(A)	申请公布日期	1998.11.04
申请号	JP19980098968	申请日期	1998.04.10
申请人	INTERNATL BUSINESS MACH CORP <IBM>;SIEMENS AG	发明人	FIEGL BERNHARD;GLASHAUSER WALTER;LEVY MAX G;NASTASI VICTOR R
分类号	H01L21/76;H01L21/304;H01L21/3105;H01L21/762;(IPC1-7):H01L21/76	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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