| 摘要 |
PROBLEM TO BE SOLVED: To automate an exchange of rubber pads, to prevent an increase in cost due to the complicatedness of an exchange, which is made by hand operation, of the rubber pads and also to shorten the time to take for the exchange of the rubber pads by a method wherein a transfer device is provided with a mechanism for exchanging automatically the rubber pads, which are used according to the properties of the object to be transferred, for other rubber pads. SOLUTION: A transfer device 1 has first and second transfer arms 2 and 3, a first transfer arm holder 4 for housing the arm 2 and a second transfer arm holder 5 for housing the arm 3. Rubber pads 34 of a kind, which is different from the kind of rubber pads 33 provided in the arm 2 in material, shape and the like, are provided in the arm 3. When the pads 33 are wanted to exchange for the pads 34 according to the nature of a semiconductor wafer 10 to be transferred, the arm 2 is housed in the holder 4, the arm 3 is taken out from the holder 5 and is mounted to a transfer robot 30 and the pads 34 are used. |
